Optimized RF Power for Mature Semiconductor Nodes

Advanced Energy has introduced a high-efficiency RF power rack specifically designed for mature node semiconductor fabrication facilities. The solution addresses the growing need for reliable, energy-efficient RF power delivery in fabs running legacy and long-lifecycle process technologies

Designed to Reduce Energy and Operating Costs

The new RF power rack improves overall system efficiency, helping fabs lower power consumption while maintaining consistent RF output. This is especially valuable for mature node manufacturing, where cost control and long-term operational stability are critical to profitability

Centralized Power Architecture for Fab Environments

By consolidating RF power generation into a centralized rack system, Advanced Energy enables simpler installation and maintenance. The architecture supports multiple process tools while reducing equipment footprint and streamlining power distribution across the fab floor.

Reliable Performance for Continuous Production

The RF rack is engineered for high uptime and long service life. It delivers stable RF power under continuous operation, supporting plasma-based semiconductor processes such as etching and deposition that demand precise and repeatable energy control.

Built for Integration into Existing Fabs

Designed with backward compatibility in mind, the solution integrates smoothly into existing fab infrastructure. This allows manufacturers to upgrade RF power efficiency without major changes to tools or facility layout.

Key Features

• High-efficiency RF power delivery

• Centralized rack-based architecture

• Reduced energy consumption and operating cost

• Stable output for plasma processing tools

• Designed for mature node fab environments

Applications

• Mature node semiconductor fabrication

• Plasma etch and deposition processes

• Legacy logic and analog device manufacturing

• Power-efficient fab upgrades

• High-uptime semiconductor production lines

Improving Efficiency Across Long-Lifecycle Fabs

With this new RF power rack, Advanced Energy provides semiconductor manufacturers a practical path to improve energy efficiency and reliability without disrupting existing processes. The solution supports long-term fab operations by balancing performance, cost control, and operational simplicity — key priorities for mature node semiconductor production

Advanced Energy Unveils Efficient RF Power Rack for Fabs

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